SensArray Corporation provides wafer level process metrology used for monitoring and controlling critical semiconductor manufacturing processes. It offers instruments and software for acquiring, analyzing, visualizing, and managing thermal data, as well as the tools to help boost device quality and output, optimize run times, control process temperatures, reduce downtime, and lower test wafer consumption. The company provides process probes that include semiconductor front-end and back-end, customer reflow, and flat panel display probes; sensor probes, such as system state, temperature, humidity, and air velocity probes, as well as measurement bundle products; integrated systems, which include integrated wafer and central operating hubs; and real-time systems, including thermal MAP and TRACK, APTOS, and Accura?C. It also offers calibration and repair services, and software upgrades. The company serves semiconductor, flat panel display, and photomask manufacturing industries. The company was founded in 1987 and is based in Santa Clara, California with additional offices in Japan, Taiwan, and Korea. As of January 16, 2007, SensArray Corporation is a subsidiary of KLA-Tencor Corp.