ADE Corporation engages in the design, manufacture, marketing, and service of production metrology and inspection systems for the semiconductor wafer, semiconductor device, magnetic data storage, and optics manufacturing industries worldwide. It primarily offers automated measurement, defect detection, and handling equipment. The company operates in three segments: ADE Semiconductor Systems Group (SSG), ADE Phase Shift (PST), and ADE Technologies (ATI). The SSG segment manufactures multifunctional semiconductor metrology systems, semiconductor wafer defect inspection and classification equipment, and process control data and yield analysis and management systems. It also sells stand-alone software products and provides software-consulting services. The PST segment produces noncontact surface metrology equipment using interferometric technology, which provides enhanced yield management to the data storage, semiconductor, and optics industries. The ATI segment manufactures magnetic characterization and noncontact dimensional metrology gauging systems for the magnetic data storage, fundamental research, and semiconductor manufacturing industries. ADE markets its products through its direct sales force, distributors, and independent sales representatives in the United States, Europe, Japan, and the Far East. The company also provides installation, training, product maintenance, and technical support services. ADE was founded by Robert C. Abbe in 1967 and is headquartered in Westwood, Massachusetts. As of October 12, 2006, ADE Corporation is a subsidiary of KLA-Tencor Corporation.